Inventor
JAERISCH WALTER
DE8 patents
⚠️ This page may combine multiple inventors who share the name “JAERISCH WALTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS4167337ASep 11, 1979
Interferometric apparatus and process
IBM67 citations93
US4188124AFeb 12, 1980
Interferometric measuring system
IBM28 citations81
US4895447AJan 23, 1990
Phase-sensitive interferometric mask-wafer alignment
IBM13 citations72
US4653922AMar 31, 1987
Interferometric thickness analyzer and measuring method
IBM17 citations72
US4541720ASep 17, 1985
Apparatus for phase symmetrizing optical wave fronts
IBM5 citations61
US4429992AFeb 7, 1984
Method and device for testing optical imaging systems
IBM6 citations61
US4222669ASep 16, 1980
Interferometer for determining the shape of an object
IBM4 citations60