Inventor
MAKOSCH GUENTER
DE14 patents
⚠️ This page may combine multiple inventors who share the name “MAKOSCH GUENTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
13 patentsUS5392116AFeb 21, 1995
Interferometric phase measurement
IBM96 citations95
US4167337ASep 11, 1979
Interferometric apparatus and process
IBM67 citations93
US4779001AOct 18, 1988
Interferometric mask-wafer alignment
IBM38 citations92
US4577968AMar 25, 1986
Method and arrangement for optical distance measurement
IBM49 citations92
US4358201ANov 9, 1982
Interferometric measurement apparatus and method having increased measuring range
IBM50 citations92
US4275288AJun 23, 1981
Apparatus for machining material
IBM90 citations91
US4188124AFeb 12, 1980
Interferometric measuring system
IBM28 citations81
US4498771AFeb 12, 1985
Method and means for interferometric surface topography
IBM23 citations80
US4895447AJan 23, 1990
Phase-sensitive interferometric mask-wafer alignment
IBM13 citations72
US4653922AMar 31, 1987
Interferometric thickness analyzer and measuring method
IBM17 citations72
US4764014AAug 16, 1988
Interferometric measuring methods for surfaces
IBM16 citations66
US4541720ASep 17, 1985
Apparatus for phase symmetrizing optical wave fronts
IBM5 citations61
US4429992AFeb 7, 1984
Method and device for testing optical imaging systems
IBM6 citations61