P

Inventor

FUKUDA TAKUYA

JP62 patents
⚠️ This page may combine multiple inventors who share the name “FUKUDA TAKUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

27 patents
US6432769B1Aug 13, 2002

Semiconductor integrated circuit device and process for manufacture the same

HITACHI LTD131 citations99
US6278148B1Aug 21, 2001

Semiconductor device having a shielding conductor

HITACHI LTD139 citations98
US6258649B1Jul 10, 2001

Semiconductor integrated circuit device and method of manufacturing the same

HITACHI LTD91 citations98
US6255151B1Jul 3, 2001

Semiconductor integrated circuit device and method of manufacturing same

HITACHI LTD81 citations96
US6215144B1Apr 10, 2001

Semiconductor integrated circuit device, and method of manufacturing the same

HITACHI LTD73 citations96
US5496410AMar 5, 1996

Plasma processing apparatus and method of processing substrates by using same apparatus

HITACHI LTD65 citations96
US5449411ASep 12, 1995

Microwave plasma processing apparatus

HITACHI LTD82 citations96
US5211825AMay 18, 1993

Plasma processing apparatus and the method of the same

HITACHI LTD70 citations96
US4876983AOct 31, 1989

Plasma operation apparatus

HITACHI LTD70 citations95
US6479899B1Nov 12, 2002

Semiconductor integrated circuit device and process for manufacturing the same

HITACHI LTD26 citations93
US5986299ANov 16, 1999

Semiconductor integrated circuit device having multi-level wiring capacitor structures

HITACHI LTD40 citations93
US6576946B1Jun 10, 2003

Semiconductor device comprising capacitor cells, bit lines, word lines, and MOS transistors in a memory cell area over a semiconductor substrate

HITACHI LTD24 citations92
US6423992B2Jul 23, 2002

Semiconductor integrated circuit device

HITACHI LTD35 citations92
US6399438B2Jun 4, 2002

Method of manufacturing semiconductor integrated circuit device having a capacitor

HITACHI LTD32 citations92
US5552625ASep 3, 1996

Semiconductor device having a semi-insulating layer

HITACHI LTD41 citations92
US5162633ANov 10, 1992

Microwave-excited plasma processing apparatus

HITACHI LTD27 citations92
US5084355AJan 28, 1992

Laminar structure comprising organic material and inorganic material

HITACHI LTD30 citations92
US5745336AApr 28, 1998

Capacitor for semiconductor integrated circuit

HITACHI LTD36 citations90
US5434742AJul 18, 1995

Capacitor for semiconductor integrated circuit and method of manufacturing the same

HITACHI LTD23 citations90
US6833331B2Dec 21, 2004

Method of manufacturing semiconductor integrated circuit device having insulating film formed from liquid substance containing polymer of silicon, oxygen, and hydrogen

HITACHI LTD13 citations84
US6700152B2Mar 2, 2004

Dynamic random access memory including a logic circuit and an improved storage capacitor arrangement

HITACHI LTD6 citations74
US6638811B2Oct 28, 2003

Method of manufacturing a semiconductor integrated circuit device having a capacitor

HITACHI LTD9 citations74
US6509277B1Jan 21, 2003

Method of manufacturing semiconductor integrated circuit device having insulatro film formed from liquid containing polymer of silicon, oxygen, and hydrogen

HITACHI LTD10 citations74
US5433788AJul 18, 1995

Apparatus for plasma treatment using electron cyclotron resonance

HITACHI LTD9 citations74
US5347100ASep 13, 1994

Semiconductor device, process for the production thereof and apparatus for microwave plasma treatment

HITACHI LTD13 citations73
US5182495AJan 26, 1993

Plasma processing method and apparatus using electron cyclotron resonance

HITACHI LTD13 citations73
US5243259ASep 7, 1993

Microwave plasma processing apparatus

HITACHI LTD2 citations61

KAWASAKI HEAVY IND LTD

9 patents

ADEKA CORP

7 patents

NISSAN MOTOR

1 patent

HIATCHI LTD

1 patent

HASHIGUCHI YUKIO

1 patent

YASKAWA DENKI SEISAKUSHO KK

1 patent

TOYOTA MOTOR CO LTD

1 patent

BANDO KENJI

1 patent

YASKAWA ELECTRIC CORP

1 patent

Showing the top 50 of 62 patents by PatentIndex Score.