Inventor
MUROOKA KEN-ICHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “MUROOKA KEN-ICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
5 patentsUS5923034AJul 13, 1999
Pattern transfer mask, mask inspection method and a mask inspection apparatus
TOSHIBA KK27 citations92
US5166962ANov 24, 1992
X-ray mask, method of manufacturing the same, and exposure method using the same
TOSHIBA KK49 citations92
US6248508B1Jun 19, 2001
Manufacturing a circuit element
TOSHIBA KK24 citations91
US5291536AMar 1, 1994
X-ray mask, method for fabricating the same, and pattern formation method
TOSHIBA KK16 citations73
US6028317AFeb 22, 2000
Charged particle beam optical element charged particle beam exposure apparatus and method of adjusting the same
TOSHIBA KK12 citations72