Inventor

PENNER KLAUS

US5 patents

⚠️ This page may combine multiple inventors who share the name “PENNER KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US5800626ASep 1, 1998

Control of gas content in process liquids for improved megasonic cleaning of semiconductor wafers and microelectronics substrates

IBM142 citations95

US6190955B1Feb 20, 2001

Fabrication of trench capacitors using disposable hard mask

IBM25 citations91

SIEMENS AG

2 patents

US6245640B1Jun 12, 2001

Method for fabricating a semiconductor structure

SIEMENS AG57 citations92

US5683945ANov 4, 1997

Uniform trench fill recess by means of isotropic etching

SIEMENS AG15 citations72

INFINEON TECHNOLOGIES AG

1 patent

US6544856B2Apr 8, 2003

Method for increasing the trench capacitance

INFINEON TECHNOLOGIES AG14 citations81