Inventor
NAKAISHI MASAFUMI
JP3 patents
Patents
3 patentsUS5906912AMay 25, 1999
Processes for forming resist pattern and for producing semiconductor device
FUJITSU LTD20 citations90
US5082695AJan 21, 1992
Method of fabricating an x-ray exposure mask
FUJITSU LTD19 citations81
US4820546AApr 11, 1989
Method for production of X-ray-transparent membrane
FUJITSU LTD0 citations49