Inventor
SOININEN PEKKA J
FI23 patents
⚠️ This page may combine multiple inventors who share the name “SOININEN PEKKA J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INT
9 patentsUS7494927B2Feb 24, 2009
Method of growing electrical conductors
ASM INT127 citations99
US6887795B2May 3, 2005
Method of growing electrical conductors
ASM INT158 citations99
US7955979B2Jun 7, 2011
Method of growing electrical conductors
ASM INT88 citations98
US6727169B1Apr 27, 2004
Method of making conformal lining layers for damascene metallization
ASM INT225 citations98
US7537662B2May 26, 2009
Method and apparatus for depositing thin films on a surface
ASM INT46 citations96
US7102235B2Sep 5, 2006
Conformal lining layers for damascene metallization
ASM INT17 citations91
US7732331B2Jun 8, 2010
Copper interconnect structure having stuffed diffusion barrier
ASM INT12 citations84
US7323422B2Jan 29, 2008
Dielectric layers and methods of forming the same
ASM INT8 citations74
US7670944B2Mar 2, 2010
Conformal lining layers for damascene metallization
ASM INT3 citations62
BENEQ OY
4 patentsUS11421319B2Aug 23, 2022
Plasma etch-resistant film and a method for its fabrication
BENEQ OY0 citations54
US10961620B2Mar 30, 2021
Plasma etch-resistant film and a method for its fabrication
BENEQ OY0 citations54
US12000043B2Jun 4, 2024
Precursor source arrangement and atomic layer deposition apparatus
BENEQ OY0 citations45
US11634814B2Apr 25, 2023
Atomic layer deposition apparatus
BENEQ OY0 citations45