Inventor

VORSA VASIL

US4 patents

⚠️ This page may combine multiple inventors who share the name “VORSA VASIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BENEQ OY

2 patents

US11421319B2Aug 23, 2022

Plasma etch-resistant film and a method for its fabrication

BENEQ OY0 citations54

US10961620B2Mar 30, 2021

Plasma etch-resistant film and a method for its fabrication

BENEQ OY0 citations54

BERTRAM JR RONALD THOMAS

1 patent

US8431419B2Apr 30, 2013

UV absorption based monitor and control of chloride gas stream

BERTRAM JR RONALD THOMAS3 citations58

VORSA VASIL

1 patent

US8580993B2Nov 12, 2013

Amino vinylsilane precursors for stressed SiN films

VORSA VASIL1 citations43