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Inventor
KYUNG SE JIN
KR
2 patents
Patents
2 patents
US10982782B2
Apr 20, 2021
Valve apparatus
SAMSUNG ELECTRONICS CO LTD
1 citations
54
US12469721B2
Nov 11, 2025
Apparatus for manufacturing a semiconductor device and method of manufacturing the apparatus
SAMSUNG ELECTRONICS CO LTD
0 citations
46