Inventor
CAMPANA-SCHMITT FRANCIMAR
US4 patents
Patents
4 patentsUS6764958B1Jul 20, 2004
Method of depositing dielectric films
APPLIED MATERIALS INC314 citations98
US6521302B1Feb 18, 2003
Method of reducing plasma-induced damage
APPLIED MATERIALS INC38 citations85
US7117064B2Oct 3, 2006
Method of depositing dielectric films
APPLIED MATERIALS INC5 citations73
US7001850B2Feb 21, 2006
Method of depositing dielectric films
APPLIED MATERIALS INC7 citations73