Inventor
TOLIA ANISH
US10 patents
Patents
10 patentsUS6398929B1Jun 4, 2002
Plasma reactor and shields generating self-ionized plasma for sputtering
APPLIED MATERIALS INC128 citations98
US6117245ASep 12, 2000
Method and apparatus for controlling cooling and heating fluids for a gas distribution plate
APPLIED MATERIALS INC252 citations98
US6582569B1Jun 24, 2003
Process for sputtering copper in a self ionized plasma
APPLIED MATERIALS INC75 citations97
US6413383B1Jul 2, 2002
Method for igniting a plasma in a sputter reactor
APPLIED MATERIALS INC92 citations97
US6893541B2May 17, 2005
Multi-step process for depositing copper seed layer in a via
APPLIED MATERIALS INC51 citations95
US6433314B1Aug 13, 2002
Direct temperature control for a component of a substrate processing chamber
APPLIED MATERIALS INC62 citations95
US6345642B1Feb 12, 2002
Method and apparatus for removing processing liquid from a processing liquid path
APPLIED MATERIALS INC31 citations91
US6297147B1Oct 2, 2001
Plasma treatment for ex-situ contact fill
APPLIED MATERIALS INC50 citations91
US6375753B1Apr 23, 2002
Method and apparatus for removing processing liquid from a processing liquid delivery line
APPLIED MATERIALS INC9 citations73
US6305392B1Oct 23, 2001
Method and apparatus for removing processing liquid from a processing liquid delivery line
APPLIED MATERIALS INC2 citations62