Inventor
RUSH JOHN M
US10 patents
⚠️ This page may combine multiple inventors who share the name “RUSH JOHN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FORTREND ENGINEERING CORP
8 patentsUS5193969AMar 16, 1993
Wafer transfer machine
FORTREND ENGINEERING CORP362 citations96
US5934991AAug 10, 1999
Pod loader interface improved clean air system
FORTREND ENGINEERING CORP59 citations95
US5870488AFeb 9, 1999
Method and apparatus for prealigning wafers in a wafer sorting system
FORTREND ENGINEERING CORP110 citations94
US6494666B2Dec 17, 2002
Simplified and enhanced SCARA arm
FORTREND ENGINEERING CORP42 citations91
US5885045AMar 23, 1999
Integrated wafer pod-load/unload and mass-transfer system
FORTREND ENGINEERING CORP22 citations91
US5984610ANov 16, 1999
Pod loader interface
FORTREND ENGINEERING CORP39 citations90
US6193459B1Feb 27, 2001
Integrated wafer pod-load/unload and mass-transfer system
FORTREND ENGINEERING CORP14 citations72
US6086323AJul 11, 2000
Method for supplying wafers to an IC manufacturing process
FORTREND ENGINEERING CORP12 citations71