Inventor
POULIN JAMES M
US5 patents
Patents
5 patentsUS7000479B1Feb 21, 2006
Heated pressure transducer
MKS INSTR INC22 citations90
US6588280B1Jul 8, 2003
Pressure transducer with compensation for thermal transients
MKS INSTR INC33 citations90
US6612176B2Sep 2, 2003
Pressure transducer assembly with thermal shield
MKS INSTR INC24 citations88
US7124640B1Oct 24, 2006
Thermal mounting plate for heated pressure transducer
MKS INSTR INC26 citations87
US6772640B1Aug 10, 2004
Multi-temperature heater for use with pressure transducers
MKS INSTR INC30 citations87