Inventor
MATHEW SANTHI E
US5 patents
Patents
5 patentsUS6588280B1Jul 8, 2003
Pressure transducer with compensation for thermal transients
MKS INSTR INC33 citations90
US6687635B2Feb 3, 2004
Apparatus and method for compensated sensor output
MKS INSTR INC32 citations89
US6612176B2Sep 2, 2003
Pressure transducer assembly with thermal shield
MKS INSTR INC24 citations88
US6772640B1Aug 10, 2004
Multi-temperature heater for use with pressure transducers
MKS INSTR INC30 citations87
US7451654B2Nov 18, 2008
Constant power dissipation in capacitance pressure transducers
MKS INSTR INC9 citations79