Inventor
OZGUR MEHMET
US20 patents
⚠️ This page may combine multiple inventors who share the name “OZGUR MEHMET”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CORP FOR NAT RES INITIATIVES
9 patentsUS6815739B2Nov 9, 2004
Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
CORP FOR NAT RES INITIATIVES208 citations98
US7045440B2May 16, 2006
Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
CORP FOR NAT RES INITIATIVES68 citations97
US7012327B2Mar 14, 2006
Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
CORP FOR NAT RES INITIATIVES40 citations96
US7188530B2Mar 13, 2007
Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure
CORP FOR NAT RES INITIATIVES24 citations92
US7024936B2Apr 11, 2006
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure
CORP FOR NAT RES INITIATIVES22 citations92
US6800912B2Oct 5, 2004
Integrated electromechanical switch and tunable capacitor and method of making the same
CORP FOR NAT RES INITIATIVES36 citations92
US6969630B2Nov 29, 2005
Method of making an integrated electromechanical switch and tunable capacitor
CORP FOR NAT RES INITIATIVES27 citations91
US7017419B2Mar 28, 2006
Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure
CORP FOR NAT RES INITIATIVES13 citations84
US8983414B2Mar 17, 2015
Versatile communication system and method of implementation using heterogeneous integration
CORP FOR NAT RES INITIATIVES1 citations52
CORPORATION FOR NATIONAL RES INITIATIVES
6 patentsUS11927281B1Mar 12, 2024
Piezoelectrically-actuated microvalve device and method of fabrication
CORPORATION FOR NATIONAL RES INITIATIVES3 citations74
US11049725B1Jun 29, 2021
Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride
CORPORATION FOR NATIONAL RES INITIATIVES2 citations73
US10403463B2Sep 3, 2019
Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices
CORPORATION FOR NATIONAL RES INITIATIVES2 citations70
US11984321B1May 14, 2024
Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride
CORPORATION FOR NATIONAL RES INITIATIVES0 citations62
US11075086B1Jul 27, 2021
Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride
CORPORATION FOR NATIONAL RES INITIATIVES0 citations62
US10910185B2Feb 2, 2021
Method for the fabrication of electron field emission devices including carbon nanotube electron field emission devices
CORPORATION FOR NATIONAL RES INITIATIVES0 citations59