Inventor
VIJFVINKEL JAKOB
NL18 patents
⚠️ This page may combine multiple inventors who share the name “VIJFVINKEL JAKOB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS6603130B1Aug 5, 2003
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses
ASML NETHERLANDS BV733 citations98
US6445440B1Sep 3, 2002
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV52 citations95
US7247866B2Jul 24, 2007
Contamination barrier with expandable lamellas
ASML NETHERLANDS BV16 citations92
US6618122B2Sep 9, 2003
Movable support in a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV33 citations92
US6597433B1Jul 22, 2003
Multi-stage drive arrangements and their application in lithographic projection apparatuses
ASML NETHERLANDS BV23 citations92
US6421112B1Jul 16, 2002
Movable support in a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV26 citations92
US6597429B2Jul 22, 2003
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV20 citations86
US6774374B1Aug 10, 2004
Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses
ASML NETHERLANDS BV17 citations79
US7737425B2Jun 15, 2010
Contamination barrier with expandable lamellas
ASML NETHERLANDS BV5 citations73
US6844922B2Jan 18, 2005
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus
ASML NETHERLANDS BV11 citations73
US6816238B2Nov 9, 2004
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV3 citations62
US6903805B2Jun 7, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations60
US6747731B2Jun 8, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV1 citations45
PHILIPS CORP
3 patentsUS5441442AAug 15, 1995
Method of manufacturing a plate having a plane main surface, method of manufacturing a plate having parallel main surfaces, and device suitable for implementing said methods
PHILIPS CORP22 citations90
US5818318AOct 6, 1998
Magnetic clamping device
PHILIPS CORP18 citations82
US5397185AMar 14, 1995
Device for the axial support of a rotatable body, and positioning device provided with such a device
PHILIPS CORP3 citations56