P

Inventor

VIJFVINKEL JAKOB

NL18 patents
⚠️ This page may combine multiple inventors who share the name “VIJFVINKEL JAKOB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

13 patents
US6603130B1Aug 5, 2003

Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses

ASML NETHERLANDS BV733 citations98
US6445440B1Sep 3, 2002

Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses

ASML NETHERLANDS BV52 citations95
US7247866B2Jul 24, 2007

Contamination barrier with expandable lamellas

ASML NETHERLANDS BV16 citations92
US6618122B2Sep 9, 2003

Movable support in a vacuum chamber and its application in lithographic projection apparatuses

ASML NETHERLANDS BV33 citations92
US6597433B1Jul 22, 2003

Multi-stage drive arrangements and their application in lithographic projection apparatuses

ASML NETHERLANDS BV23 citations92
US6421112B1Jul 16, 2002

Movable support in a vacuum chamber and its application in lithographic projection apparatuses

ASML NETHERLANDS BV26 citations92
US6597429B2Jul 22, 2003

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV20 citations86
US6774374B1Aug 10, 2004

Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses

ASML NETHERLANDS BV17 citations79
US7737425B2Jun 15, 2010

Contamination barrier with expandable lamellas

ASML NETHERLANDS BV5 citations73
US6844922B2Jan 18, 2005

Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus

ASML NETHERLANDS BV11 citations73
US6816238B2Nov 9, 2004

Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses

ASML NETHERLANDS BV3 citations62
US6903805B2Jun 7, 2005

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations60
US6747731B2Jun 8, 2004

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV1 citations45

PHILIPS CORP

3 patents

BAKKER LEVINUS PIETER

1 patent

JDS UNIPHASE CORP

1 patent