Inventor
RENKENS MICHAEL J M
NL7 patents
Patents
7 patentsUS6603130B1Aug 5, 2003
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses
ASML NETHERLANDS BV733 citations98
US6445440B1Sep 3, 2002
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV52 citations95
US6618122B2Sep 9, 2003
Movable support in a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV33 citations92
US6597433B1Jul 22, 2003
Multi-stage drive arrangements and their application in lithographic projection apparatuses
ASML NETHERLANDS BV23 citations92
US6421112B1Jul 16, 2002
Movable support in a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV26 citations92
US6844922B2Jan 18, 2005
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus
ASML NETHERLANDS BV11 citations73
US6816238B2Nov 9, 2004
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV3 citations62