Inventor
KUBO TADAYUKI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KUBO TADAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
7 patentsUS6408045B1Jun 18, 2002
Stage system and exposure apparatus with the same
CANON KK113 citations97
US5317221AMay 31, 1994
Linear driving device
CANON KK68 citations95
US5280677AJan 25, 1994
Positioning mechanism
CANON KK95 citations95
US5142172AAug 25, 1992
Rectilinear-motion driving device for voice coil motor
CANON KK34 citations91
US6644855B2Nov 11, 2003
Stage device, exposure apparatus, device manufacturing method and movement guidance method
CANON KK13 citations83
US7198141B2Apr 3, 2007
Shock absorbing apparatus in a positioning apparatus
CANON KK5 citations62
US7184129B2Feb 27, 2007
Positioning method, and positioning apparatus
CANON KK0 citations50