Inventor
KUWAHARA JOJI
JP31 patents
⚠️ This page may combine multiple inventors who share the name “KUWAHARA JOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
29 patentsUS11139192B2Oct 5, 2021
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD3 citations73
US11127613B2Sep 21, 2021
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD3 citations72
US10395968B2Aug 27, 2019
Substrate transport device, detection position calibration method and substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations72
US10062593B2Aug 28, 2018
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD2 citations72
US12583019B2Mar 24, 2026
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD0 citations62
US11590540B2Feb 28, 2023
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD1 citations62
US11348812B2May 31, 2022
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD1 citations62
US11260429B2Mar 1, 2022
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD1 citations62
US11037808B2Jun 15, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations62
US10585362B2Mar 10, 2020
Substrate processing apparatus, alignment device, substrate processing method and alignment method
SCREEN HOLDINGS CO LTD1 citations62
US10186441B2Jan 22, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US11152233B2Oct 19, 2021
Substrate treating apparatus and substrate treating method
SCREEN HOLDINGS CO LTD1 citations59
US11075101B2Jul 27, 2021
Indexer apparatus, substrate treating apparatus, method for controlling indexer apparatus, and method for controlling substrate treating apparatus
SCREEN HOLDINGS CO LTD1 citations58
US12411414B2Sep 9, 2025
Peripheral processing method
SCREEN HOLDINGS CO LTD0 citations57
US11231651B2Jan 25, 2022
Peripheral processing apparatus and peripheral processing method
SCREEN HOLDINGS CO LTD0 citations57
US12035576B2Jul 9, 2024
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD0 citations52
US12014940B2Jun 18, 2024
Substrate treating system and substrate transporting method
SCREEN HOLDINGS CO LTD0 citations51
US11676842B2Jun 13, 2023
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11443968B2Sep 13, 2022
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD0 citations51
US11339011B2May 24, 2022
Substrate treating system and substrate transporting method
SCREEN HOLDINGS CO LTD0 citations51
US11302543B2Apr 12, 2022
Substrate carrier apparatus and substrate carrying method
SCREEN HOLDINGS CO LTD0 citations51
US11295974B2Apr 5, 2022
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations51
US11251060B2Feb 15, 2022
Substrate treating apparatus, carrier transporting method, and carrier buffer device
SCREEN HOLDINGS CO LTD0 citations51
US10727087B2Jul 28, 2020
Substrate transporting device, substrate treating apparatus, and substrate transporting method
SCREEN HOLDINGS CO LTD0 citations51
US10134609B2Nov 20, 2018
Substrate transporting device, substrate treating apparatus, and substrate transporting method
SCREEN HOLDINGS CO LTD0 citations51
US11101156B2Aug 24, 2021
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations49
US11152242B2Oct 19, 2021
Substrate treating apparatus and method for controlling substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations47
US10627800B2Apr 21, 2020
Substrate transport device, substrate processing apparatus including the substrate transport device, and substrate transport method
SCREEN HOLDINGS CO LTD0 citations41
US10468284B2Nov 5, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations41