Inventor
DESHPANDE SADANAND V
US17 patents
Patents
17 patentsUS7595010B2Sep 29, 2009
Method for producing a doped nitride film, doped oxide film and other doped films
IBM57 citations97
US7361611B2Apr 22, 2008
Doped nitride film, doped oxide film and other doped films
IBM55 citations97
US6790733B1Sep 14, 2004
Preserving TEOS hard mask using COR for raised source-drain including removable/disposable spacer
IBM122 citations97
US6930030B2Aug 16, 2005
Method of forming an electronic device on a recess in the surface of a thin film of silicon etched to a precise thickness
IBM57 citations95
US6960510B2Nov 1, 2005
Method of making sub-lithographic features
IBM21 citations92
US6887798B2May 3, 2005
STI stress modification by nitrogen plasma treatment for improving performance in small width devices
IBM16 citations92
US6512266B1Jan 28, 2003
Method of fabricating SiO2 spacers and annealing caps
IBM40 citations92
US6884734B2Apr 26, 2005
Vapor phase etch trim structure with top etch blocking layer
IBM38 citations91
US7479688B2Jan 20, 2009
STI stress modification by nitrogen plasma treatment for improving performance in small width devices
IBM11 citations84
US7407875B2Aug 5, 2008
Low resistance contact structure and fabrication thereof
IBM16 citations84
US7700425B2Apr 20, 2010
Raised source drain mosfet with amorphous notched gate cap layer with notch sidewalls passivated and filled with dielectric plug
IBM8 citations83
US6903023B2Jun 7, 2005
In-situ plasma etch for TERA hard mask materials
IBM15 citations80
US7344983B2Mar 18, 2008
Clustered surface preparation for silicide and metal contacts
IBM4 citations62
US7091081B2Aug 15, 2006
Method for patterning a semiconductor region
IBM3 citations56
US7354867B2Apr 8, 2008
Etch process for improving yield of dielectric contacts on nickel silicides
IBM1 citations50
US9451684B2Sep 20, 2016
Dual pulse driven extreme ultraviolet (EUV) radiation source method
IBM0 citations48
US9301381B1Mar 29, 2016
Dual pulse driven extreme ultraviolet (EUV) radiation source utilizing a droplet comprising a metal core with dual concentric shells of buffer gas
IBM0 citations48