Inventor
MELLO KEVIN E
US6 patents
⚠️ This page may combine multiple inventors who share the name “MELLO KEVIN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS7344983B2Mar 18, 2008
Clustered surface preparation for silicide and metal contacts
IBM4 citations62
US7015140B2Mar 21, 2006
Selective salicidation methods
IBM2 citations60
US7538029B2May 26, 2009
Method of room temperature growth of SiOx on silicide as an etch stop layer for metal contact open of semiconductor devices
IBM0 citations48
US7479436B2Jan 20, 2009
Feed forward silicide control scheme based on spacer height controlling preclean time
IBM0 citations48