Inventor
MILES DARRELL L
US9 patents
Patents
9 patentsUS6894522B2May 17, 2005
Specific site backside underlaying and micromasking method for electrical characterization of semiconductor devices
IBM29 citations88
US6790125B2Sep 14, 2004
Backside integrated circuit die surface finishing technique and tool
IBM13 citations82
US7112983B2Sep 26, 2006
Apparatus and method for single die backside probing of semiconductor devices
IBM6 citations67
US7993504B2Aug 9, 2011
Backside unlayering of MOSFET devices for electrical and physical characterization
IBM3 citations61
US7371689B2May 13, 2008
Backside unlayering of MOSFET devices for electrical and physical characterization
IBM3 citations61
US6852629B2Feb 8, 2005
Backside integrated circuit die surface finishing technique and tool
IBM2 citations60
US7015146B2Mar 21, 2006
Method of processing backside unlayering of MOSFET devices for electrical and physical characterization including a collimated ion plasma
IBM0 citations51
US7961307B2Jun 14, 2011
Angular spectrum tailoring in solid immersion microscopy for circuit analysis
IBM0 citations50
US7826045B2Nov 2, 2010
Angular spectrum tailoring in solid immersion microscopy for circuit analysis
IBM1 citations50