Inventor
DIEHL DANIEL LEE
JP26 patents
Patents
26 patentsUSD904640SDec 8, 2020
Substrate carrier
APPLIED MATERIALS INC20 citations91
US10236412B2Mar 19, 2019
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices
APPLIED MATERIALS INC3 citations84
US9478421B2Oct 25, 2016
Optically tuned hardmask for multi-patterning applications
APPLIED MATERIALS INC6 citations84
US9177796B2Nov 3, 2015
Optically tuned hardmask for multi-patterning applications
APPLIED MATERIALS INC7 citations84
US10886155B2Jan 5, 2021
Optical stack deposition and on-board metrology
APPLIED MATERIALS INC7 citations79
US11081623B2Aug 3, 2021
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices
APPLIED MATERIALS INC2 citations73
US10546973B2Jan 28, 2020
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices
APPLIED MATERIALS INC1 citations73
US10109481B2Oct 23, 2018
Aluminum-nitride buffer and active layers by physical vapor deposition
APPLIED MATERIALS INC3 citations73
US9633839B2Apr 25, 2017
Methods for depositing dielectric films via physical vapor deposition processes
APPLIED MATERIALS INC2 citations72
US11550222B2Jan 10, 2023
Dose reduction of patterned metal oxide photoresists
APPLIED MATERIALS INC3 citations70
US9478697B2Oct 25, 2016
Reusable substrate carrier
APPLIED MATERIALS INC3 citations69
US11495461B2Nov 8, 2022
Film stack for lithography applications
APPLIED MATERIALS INC2 citations68
US11778926B2Oct 3, 2023
Method and apparatus for deposition of multilayer device with superconductive film
APPLIED MATERIALS INC0 citations62
US11575071B2Feb 7, 2023
Oxygen controlled PVD ALN buffer for GAN-based optoelectronic and electronic devices
APPLIED MATERIALS INC0 citations62
US11437559B2Sep 6, 2022
Method and apparatus for deposition of multilayer device with superconductive film
APPLIED MATERIALS INC1 citations62
US11056277B2Jul 6, 2021
Magnetized substrate carrier apparatus with shadow mask for deposition
APPLIED MATERIALS INC0 citations62
US9337051B2May 10, 2016
Method for critical dimension reduction using conformal carbon films
APPLIED MATERIALS INC2 citations62
US9929310B2Mar 27, 2018
Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devices
APPLIED MATERIALS INC1 citations61
US11994800B2May 28, 2024
Dose reduction of patterned metal oxide photoresists
APPLIED MATERIALS INC0 citations60
US11802349B2Oct 31, 2023
Method for depositing high quality PVD films
APPLIED MATERIALS INC0 citations60
US11739418B2Aug 29, 2023
Method and apparatus for deposition of metal nitrides
APPLIED MATERIALS INC0 citations52
US10193014B2Jan 29, 2019
Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices
APPLIED MATERIALS INC0 citations52
US11313034B2Apr 26, 2022
Methods for depositing amorphous silicon layers or silicon oxycarbide layers via physical vapor deposition
APPLIED MATERIALS INC0 citations51
US10096725B2Oct 9, 2018
Method for graded anti-reflective coatings by physical vapor deposition
APPLIED MATERIALS INC1 citations50
US12125728B2Oct 22, 2024
Substrate carrier
APPLIED MATERIALS INC0 citations49
US9746678B2Aug 29, 2017
Light wave separation lattices and methods of forming light wave separation lattices
APPLIED MATERIALS INC1 citations48