P

Inventor

SHIMAZU TSUYOSHI

JP7 patents
⚠️ This page may combine multiple inventors who share the name “SHIMAZU TSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJIKIN KK

3 patents
US9010369B2Apr 21, 2015

Flow rate range variable type flow rate control apparatus

FUJIKIN KK8 citations83
US9921089B2Mar 20, 2018

Flow rate range variable type flow rate control apparatus

FUJIKIN KK2 citations72
US9383758B2Jul 5, 2016

Flow rate range variable type flow rate control apparatus

FUJIKIN KK4 citations72

CKD CORP

1 patent
US7353841B2Apr 8, 2008

Relative pressure control system and relative flow control system

CKD CORP101 citations96

OHMI TADAHIRO

1 patent
US8418714B2Apr 16, 2013

Flow rate range variable type flow rate control apparatus

OHMI TADAHIRO16 citations83

TOKYO ELECTRON LTD

1 patent
US7481240B2Jan 27, 2009

Partial pressure control system, flow rate control system and shower plate used for partial pressure control system

TOKYO ELECTRON LTD10 citations83

NAGAOKA HIDEKI

1 patent
US8109288B2Feb 7, 2012

Flow rate control system and shower plate used for partial pressure control system

NAGAOKA HIDEKI3 citations56