Inventor

ITO KEIKI

JP8 patents

⚠️ This page may combine multiple inventors who share the name “ITO KEIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents

US9441791B2Sep 13, 2016

Gas supply unit, substrate processing apparatus and supply gas setting method

TOKYO ELECTRON LTD21 citations90

US5554249ASep 10, 1996

Magnetron plasma processing system

TOKYO ELECTRON LTD30 citations90

US7481240B2Jan 27, 2009

Partial pressure control system, flow rate control system and shower plate used for partial pressure control system

TOKYO ELECTRON LTD10 citations83

US10074519B2Sep 11, 2018

Plasma processing apparatus and filter unit

TOKYO ELECTRON LTD1 citations50

US10056230B2Aug 21, 2018

Power supply system, plasma processing apparatus and power supply control method

TOKYO ELECTRON LTD1 citations50

CKD CORP

1 patent

US7353841B2Apr 8, 2008

Relative pressure control system and relative flow control system

CKD CORP101 citations96

MIZUSAWA KENETSU

1 patent

US8906193B2Dec 9, 2014

Gas supply unit, substrate processing apparatus and supply gas setting method

MIZUSAWA KENETSU5 citations70

NAGAOKA HIDEKI

1 patent

US8109288B2Feb 7, 2012

Flow rate control system and shower plate used for partial pressure control system

NAGAOKA HIDEKI3 citations56