Inventor
DERKSEN ANTONIUS THEODORUS ANNA MARIA
NL39 patents
⚠️ This page may combine multiple inventors who share the name “DERKSEN ANTONIUS THEODORUS ANNA MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
23 patentsUS7738074B2Jun 15, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations98
US7936444B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations96
US9360765B2Jun 7, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations93
US9097987B2Aug 4, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US7982850B2Jul 19, 2011
Immersion lithographic apparatus and device manufacturing method with gas supply
ASML NETHERLANDS BV14 citations93
US7932999B2Apr 26, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations93
US9798246B2Oct 24, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9477160B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9383655B2Jul 5, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9091940B2Jul 28, 2015
Lithographic apparatus and method involving a fluid inlet and a fluid outlet
ASML NETHERLANDS BV5 citations84
US10656538B2May 19, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10503084B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US11170907B2Nov 9, 2021
Radioisotope production
ASML NETHERLANDS BV4 citations71
US10620545B2Apr 14, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US11908591B2Feb 20, 2024
Enrichment and radioisotope production
ASML NETHERLANDS BV0 citations63
US10962891B2Mar 30, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US7936447B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57
US10466595B2Nov 5, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10222706B2Mar 5, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10151989B2Dec 11, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9885965B2Feb 6, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9733575B2Aug 15, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9588442B2Mar 7, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
STREEFKERK BOB
6 patentsUS8913223B2Dec 16, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB2 citations63
US8823920B2Sep 2, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB2 citations63
US8964164B2Feb 24, 2015
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8724084B2May 13, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8724083B2May 13, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8711323B2Apr 29, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
VOGEL HERMAN
3 patentsUS8730450B2May 20, 2014
Immersion photolithography system and method using microchannel nozzles
VOGEL HERMAN4 citations83
US8670105B2Mar 11, 2014
Immersion photolithography system and method using microchannel nozzles
VOGEL HERMAN3 citations73
US8817230B2Aug 26, 2014
Immersion photolithography system and method using microchannel nozzles
VOGEL HERMAN0 citations51
ASML HOLDING NV
3 patentsUS8004649B2Aug 23, 2011
Immersion photolithography system and method using microchannel nozzles
ASML HOLDING NV4 citations74
US9715178B2Jul 25, 2017
Immersion photolithography system and method using microchannel nozzles
ASML HOLDING NV1 citations63
US9709899B2Jul 18, 2017
Immersion photolithography system and method using microchannel nozzles
ASML HOLDING NV0 citations52