Inventor
VAN DER TOORN JAN-GERARD CORNELIS
NL45 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER TOORN JAN-GERARD CORNELIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
32 patentsUS7936444B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations96
US7701550B2Apr 20, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations96
US7602470B2Oct 13, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations95
US8031325B2Oct 4, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations92
US9798246B2Oct 24, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9488923B2Nov 8, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9477160B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US7817243B2Oct 19, 2010
Vibration isolation system
ASML NETHERLANDS BV13 citations83
US7929112B2Apr 19, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations74
US7928407B2Apr 19, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations73
US11694870B2Jul 4, 2023
Stage apparatus
ASML NETHERLANDS BV2 citations69
US9477153B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US7751032B2Jul 6, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US12451321B2Oct 21, 2025
Apparatus for obtaining optical measurements in a charged particle apparatus
ASML NETHERLANDS BV0 citations62
US11031209B2Jun 8, 2021
Scanning efficiency by individual beam steering of multi-beam apparatus
ASML NETHERLANDS BV0 citations62
US10705439B2Jul 7, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US7630059B2Dec 8, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations62
US11908656B2Feb 20, 2024
Stage apparatus suitable for a particle beam apparatus
ASML NETHERLANDS BV0 citations59
US12051607B2Jul 30, 2024
Substrate positioning device with remote temperature sensor
ASML NETHERLANDS BV0 citations58
US11996263B2May 28, 2024
Stage apparatus
ASML NETHERLANDS BV0 citations58
US12525900B2Jan 13, 2026
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US12028000B2Jul 2, 2024
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US11637512B2Apr 25, 2023
Object table comprising an electrostatic clamp
ASML NETHERLANDS BV0 citations57
US12051562B2Jul 30, 2024
Method, apparatus, and system for wafer grounding
ASML NETHERLANDS BV0 citations56
US10599054B2Mar 24, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10488759B2Nov 26, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10466595B2Nov 5, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10451973B2Oct 22, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10331047B2Jun 25, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9904185B2Feb 27, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9507278B2Nov 29, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US7859644B2Dec 28, 2010
Lithographic apparatus, immersion projection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
STREEFKERK BOB
5 patentsUS8248577B2Aug 21, 2012
Lithographic apparatus and device manufacturing method
STREEFKERK BOB9 citations83
US8860924B2Oct 14, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB1 citations62
US8964164B2Feb 24, 2015
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8724083B2May 13, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
US8724084B2May 13, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations52
JANSEN HANS
3 patentsUS8233135B2Jul 31, 2012
Lithographic apparatus and device manufacturing method
JANSEN HANS55 citations97
US8138486B2Mar 20, 2012
Lithographic apparatus and device manufacturing method
JANSEN HANS2 citations62
US8481978B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
JANSEN HANS0 citations51
KEMPER NICOLAAS RUDOLF
3 patentsUS8446563B2May 21, 2013
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF6 citations83
US8755028B2Jun 17, 2014
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF0 citations62
US9097992B2Aug 4, 2015
Lithographic apparatus and device manufacturing method
KEMPER NICOLAAS RUDOLF0 citations59