Inventor
CHIU CHIH-CHIANG
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHIU CHIH-CHIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
2 patentsUS10533252B2Jan 14, 2020
Showerhead, semicondcutor processing apparatus having the same and semiconductor process
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations82
US11194259B2Dec 7, 2021
Equipment module with enhanced protection from airborne contaminants, and method of operation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations67