Inventor

LAM GARY KA HO

US3 patents

⚠️ This page may combine multiple inventors who share the name “LAM GARY KA HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

XU KUN

1 patent

US9005999B2Apr 14, 2015

Temperature control of chemical mechanical polishing

XU KUN22 citations89

DAVID JEFFREY DRUE

1 patent

US8930013B2Jan 6, 2015

Adaptively tracking spectrum features for endpoint detection

DAVID JEFFREY DRUE3 citations57

APPLIED MATERIALS INC

1 patent

US12023779B2Jul 2, 2024

Post-chemical mechanical polishing brush cleaning box

APPLIED MATERIALS INC0 citations45