Inventor
MIKAMI TAKAHIRO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “MIKAMI TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSW AKTINA SYSTEM CO LTD
6 patentsUS12154803B2Nov 26, 2024
Substrate-floatation-type laser processing apparatus and method for measuring floating height
JSW AKTINA SYSTEM CO LTD0 citations62
US11749545B2Sep 5, 2023
Substrate-floatation-type laser processing apparatus and method for measuring floating height
JSW AKTINA SYSTEM CO LTD0 citations62
US11446762B2Sep 20, 2022
Laser irradiation apparatus, laser irradiation method, and method of manufacturing semiconductor device
JSW AKTINA SYSTEM CO LTD1 citations61
US11348787B2May 31, 2022
Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
JSW AKTINA SYSTEM CO LTD0 citations51
US12138710B2Nov 12, 2024
Laser processing apparatus and method of manufacturing semiconductor device
JSW AKTINA SYSTEM CO LTD0 citations50
US11355343B2Jun 7, 2022
Laser irradiation apparatus, laser irradiation method, and method of manufacturing semiconductor device
JSW AKTINA SYSTEM CO LTD0 citations50