Inventor
TANATSUGU YUSUKE
TW3 patents
⚠️ This page may combine multiple inventors who share the name “TANATSUGU YUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NISSAN CHEMICAL CORP
2 patentsUS11984320B2May 14, 2024
Method for polishing silicon wafer with reduced wear on carrier, and polishing liquid used therein
NISSAN CHEMICAL CORP0 citations56
US11621171B2Apr 4, 2023
Method for polishing silicon wafer with reduced wear on carrier, and polishing liquid used therein
NISSAN CHEMICAL CORP0 citations56