Inventor
TAKAHASHI MICHIHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI MICHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUSD932725SOct 5, 2021
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TOKYO ELECTRON LTD6 citations81
USD923902SJun 29, 2021
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TOKYO ELECTRON LTD6 citations81
USD937526SNov 30, 2021
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TOKYO ELECTRON LTD2 citations70
US11114318B2Sep 7, 2021
Assembling apparatus and assembling method for semiconductor manufacturing apparatus
TOKYO ELECTRON LTD0 citations59
US11776105B2Oct 3, 2023
Contaminant detection system, contaminant detecting method, and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD1 citations56
US10518986B2Dec 31, 2019
Method for conveying reaction tube unit
TOKYO ELECTRON LTD0 citations47