Inventor

CHEN JIUN-SHEN

TW2 patents

Patents

2 patents

US10365085B2Jul 30, 2019

Method and system for measuring thickness of thin film

INER AEC EXECUTIVE YUAN4 citations63

US9892889B2Feb 13, 2018

Roll-to-roll hybrid plasma modular coating system

INER AEC EXECUTIVE YUAN1 citations45