Inventor
KAMENSKY SERGEY
US8 patents
⚠️ This page may combine multiple inventors who share the name “KAMENSKY SERGEY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS10352691B1Jul 16, 2019
Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool
KLA TENCOR CORP10 citations83
US9546862B2Jan 17, 2017
Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool
KLA TENCOR CORP6 citations83
US9702829B1Jul 11, 2017
Systems and methods for wafer surface feature detection and quantification
KLA TENCOR CORP12 citations80
US10379061B1Aug 13, 2019
Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool
KLA TENCOR CORP2 citations72
US9177370B2Nov 3, 2015
Systems and methods of advanced site-based nanotopography for wafer surface metrology
KLA TENCOR CORP5 citations72
CHEN HAIGUANG
3 patentsUS10330608B2Jun 25, 2019
Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology tools
CHEN HAIGUANG1 citations60
US9031810B2May 12, 2015
Methods and systems of object based metrology for advanced wafer surface nanotopography
CHEN HAIGUANG3 citations60
US8630479B2Jan 14, 2014
Methods and systems for improved localized feature quantification in surface metrology tools
CHEN HAIGUANG2 citations58