Inventor
BIEG HERMANN
DE12 patents
⚠️ This page may combine multiple inventors who share the name “BIEG HERMANN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS10663873B2May 26, 2020
Mirror arrangement for microlithographic projection exposure apparatus and related method
ZEISS CARL SMT GMBH2 citations71
US10606179B2Mar 31, 2020
Projection exposure apparatus for semiconductor lithography with reduce thermal deformation
ZEISS CARL SMT GMBH3 citations71
US8009343B2Aug 30, 2011
Optical imaging device having at least one system diaphragm
ZEISS CARL SMT GMBH6 citations68
US7929227B2Apr 19, 2011
Optical assembly
ZEISS CARL SMT GMBH4 citations62
US10139733B2Nov 27, 2018
Diaphragm changing device
ZEISS CARL SMT GMBH0 citations51
US9341955B2May 17, 2016
Optical aperture device
ZEISS CARL SMT GMBH0 citations51
ZEISS CARL SMT AG
3 patentsUS7791826B2Sep 7, 2010
Optical assembly
ZEISS CARL SMT AG6 citations73
US7684125B2Mar 23, 2010
Diaphragm changing device
ZEISS CARL SMT AG4 citations59
US7763870B2Jul 27, 2010
Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements
ZEISS CARL SMT AG1 citations51