Inventor
TAN TIEN FAK
US15 patents
⚠️ This page may combine multiple inventors who share the name “TAN TIEN FAK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS9659753B2May 23, 2017
Grooved insulator to reduce leakage current
APPLIED MATERIALS INC123 citations95
US10504754B2Dec 10, 2019
Systems and methods for improved semiconductor etching and component protection
APPLIED MATERIALS INC16 citations92
US9972477B2May 15, 2018
Multiple point gas delivery apparatus for etching materials
APPLIED MATERIALS INC6 citations72
US11834744B2Dec 5, 2023
Ceramic showerheads with conductive electrodes
APPLIED MATERIALS INC2 citations71
US10920319B2Feb 16, 2021
Ceramic showerheads with conductive electrodes
APPLIED MATERIALS INC1 citations71
US10522371B2Dec 31, 2019
Systems and methods for improved semiconductor etching and component protection
APPLIED MATERIALS INC2 citations71
US11915911B2Feb 27, 2024
Two piece electrode assembly with gap for plasma control
APPLIED MATERIALS INC1 citations62
US10699879B2Jun 30, 2020
Two piece electrode assembly with gap for plasma control
APPLIED MATERIALS INC1 citations62
US11735441B2Aug 22, 2023
Systems and methods for improved semiconductor etching and component protection
APPLIED MATERIALS INC0 citations61
US11591693B2Feb 28, 2023
Ceramic showerheads with conductive electrodes
APPLIED MATERIALS INC0 citations61
US11302520B2Apr 12, 2022
Chamber apparatus for chemical etching of dielectric materials
APPLIED MATERIALS INC1 citations61
US11101136B2Aug 24, 2021
Process window widening using coated parts in plasma etch processes
APPLIED MATERIALS INC1 citations60
US10297458B2May 21, 2019
Process window widening using coated parts in plasma etch processes
APPLIED MATERIALS INC1 citations60
US12340979B2Jun 24, 2025
Semiconductor processing chamber for improved precursor flow
APPLIED MATERIALS INC0 citations50