Inventor
LOH LOK KEE
US6 patents
Patents
6 patentsUS10504754B2Dec 10, 2019
Systems and methods for improved semiconductor etching and component protection
APPLIED MATERIALS INC16 citations92
US10522371B2Dec 31, 2019
Systems and methods for improved semiconductor etching and component protection
APPLIED MATERIALS INC2 citations71
US11915911B2Feb 27, 2024
Two piece electrode assembly with gap for plasma control
APPLIED MATERIALS INC1 citations62
US10699879B2Jun 30, 2020
Two piece electrode assembly with gap for plasma control
APPLIED MATERIALS INC1 citations62
US11735441B2Aug 22, 2023
Systems and methods for improved semiconductor etching and component protection
APPLIED MATERIALS INC0 citations61
US12406832B2Sep 2, 2025
Semiconductor chamber components with advanced dual layer nickel-containing coatings
APPLIED MATERIALS INC0 citations57