Inventor
GREINER KENNETH B
US15 patents
Patents
15 patentsUS11144701B2Oct 12, 2021
System and method for key parameter identification, process model calibration and variability analysis in a virtual semiconductor device fabrication environment
COVENTOR INC15 citations91
US8832620B1Sep 9, 2014
Rule checks in 3-D virtual fabrication environment
COVENTOR INC23 citations88
US9965577B2May 8, 2018
System and method for performing directed self-assembly in a 3-D virtual fabrication environment
COVENTOR INC10 citations83
US10242142B2Mar 26, 2019
Predictive 3-D virtual fabrication system and method
COVENTOR INC12 citations82
US9659126B2May 23, 2017
Modeling pattern dependent effects for a 3-D virtual semiconductor fabrication environment
COVENTOR INC12 citations82
US9317632B2Apr 19, 2016
System and method for modeling epitaxial growth in a 3-D virtual fabrication environment
COVENTOR INC11 citations82
US8959464B2Feb 17, 2015
Multi-etch process using material-specific behavioral parameters in 3-D virtual fabrication environment
COVENTOR INC14 citations82
US11861289B2Jan 2, 2024
System and method for performing process model calibration in a virtual semiconductor device fabrication environment
COVENTOR INC2 citations70
US10762267B2Sep 1, 2020
System and method for electrical behavior modeling in a 3D virtual fabrication environment
COVENTOR INC4 citations65
US11630937B2Apr 18, 2023
System and method for predictive 3-D virtual fabrication
COVENTOR INC0 citations61
US11074388B2Jul 27, 2021
System and method for predictive 3-D virtual fabrication
COVENTOR INC0 citations61
US11048847B2Jun 29, 2021
System and method for performing a multi-etch process using material-specific behavioral parameters in a 3-D virtual fabrication environment
COVENTOR INC0 citations61
US12475297B2Nov 18, 2025
System and method for performing process model calibration in a virtual semiconductor device fabrication environment
COVENTOR INC0 citations60
US12086520B2Sep 10, 2024
System and method for multi-material mesh generation from fill-fraction voxel data
COVENTOR INC1 citations50
US12423486B2Sep 23, 2025
System and method for process window optimization in a virtual semiconductor device fabrication environment
COVENTOR INC0 citations49