Inventor
KUMAGAI KAE
JP8 patents
Patents
8 patentsUS12482651B2Nov 25, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US12368027B2Jul 22, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11545355B2Jan 3, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11171012B1Nov 9, 2021
Method and apparatus for formation of protective sidewall layer for bow reduction
TOKYO ELECTRON LTD0 citations60
US12074009B2Aug 27, 2024
Apparatus for processing a substrate
TOKYO ELECTRON LTD0 citations59
US11201062B2Dec 14, 2021
Method and apparatus for processing a substrate
TOKYO ELECTRON LTD0 citations59
US12512325B2Dec 30, 2025
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations50
US11996296B2May 28, 2024
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD0 citations48