Inventor
YAMAMOTO KIYOHITO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “YAMAMOTO KIYOHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
12 patentsUS7834982B2Nov 16, 2010
Substrate holder and exposure apparatus having the same
CANON KK11 citations82
US11036149B2Jun 15, 2021
Imprint apparatus, method of operating the same, and method of manufacturing article
CANON KK2 citations72
US11422461B2Aug 23, 2022
Imprint apparatus and method of manufacturing article
CANON KK2 citations71
US11235495B2Feb 1, 2022
Imprint system and article manufacturing meihod
CANON KK2 citations71
US6952262B2Oct 4, 2005
Exposure apparatus and aligning method
CANON KK7 citations71
US12541151B2Feb 3, 2026
Apparatus and method for controlling spread of plurality of droplets of photo-curing composition
CANON KK0 citations61
US11880132B2Jan 23, 2024
Imprint apparatus and method of manufacturing article
CANON KK0 citations61
US11366385B2Jun 21, 2022
Imprint mold, manufacturing method thereof, and imprint method
CANON KK0 citations61
US7298482B2Nov 20, 2007
Exposure apparatus and aligning method
CANON KK2 citations60
US7295287B2Nov 13, 2007
Substrate holder and exposure apparatus having the same
CANON KK2 citations60
US11199770B2Dec 14, 2021
Imprint apparatus and method of manufacturing an article
CANON KK0 citations50
US10672673B2Jun 2, 2020
Method of performing analysis of pattern defect, imprint apparatus, and article manufacturing method
CANON KK0 citations50