Inventor
CHEN CHIU-HSIANG
TW13 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHIU-HSIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
10 patentsUS10707081B2Jul 7, 2020
Fine line patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10991657B2Apr 27, 2021
Method for fabricating semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11994805B2May 28, 2024
Method of operating semiconductor apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11862465B2Jan 2, 2024
Fine line patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11854996B2Dec 26, 2023
Method for fabricating semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11586115B2Feb 21, 2023
Method of operating semiconductor apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11239078B2Feb 1, 2022
Fine line patterning methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11175597B2Nov 16, 2021
Pellicle structure for lithography mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11106140B2Aug 31, 2021
Semiconductor apparatus and method of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10488766B2Nov 26, 2019
Lithography system having invisible pellicle over mask
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62