Inventor
SHINTANI ATSUKO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SHINTANI ATSUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
3 patentsUS12237145B2Feb 25, 2025
Charged particle beam device and inspection device
HITACHI HIGH TECH CORP0 citations49
US11713963B2Aug 1, 2023
Pattern shape evaluation device, pattern shape evaluation system, and pattern shape evaluation method
HITACHI HIGH TECH CORP0 citations49
US11430106B2Aug 30, 2022
Image processing device, image processing method and charged particle microscope
HITACHI HIGH TECH CORP0 citations49