Inventor
TAKAHASHI NORITSUGU
JP27 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI NORITSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
16 patentsUS7462828B2Dec 9, 2008
Inspection method and inspection system using charged particle beam
HITACHI HIGH TECH CORP18 citations92
US7449690B2Nov 11, 2008
Inspection method and inspection apparatus using charged particle beam
HITACHI HIGH TECH CORP28 citations92
US11257658B2Feb 22, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP3 citations73
US10134558B2Nov 20, 2018
Scanning electron microscope
HITACHI HIGH TECH CORP2 citations73
US7956324B2Jun 7, 2011
Charged particle beam apparatus for forming a specimen image
HITACHI HIGH TECH CORP5 citations63
US9159533B2Oct 13, 2015
Charged particle beam apparatus permitting high-resolution and high-contrast observation
HITACHI HIGH TECH CORP1 citations62
US8785890B2Jul 22, 2014
Charged particle beam apparatus permitting high-resolution and high-contrast observation
HITACHI HIGH TECH CORP2 citations62
US8026481B2Sep 27, 2011
Charged particle apparatus, scanning electron microscope, and sample inspection method
HITACHI HIGH TECH CORP6 citations62
US7847249B2Dec 7, 2010
Charged particle beam apparatus
HITACHI HIGH TECH CORP4 citations62
US9443695B2Sep 13, 2016
Charged-particle beam device
HITACHI HIGH TECH CORP0 citations52
US9960006B2May 1, 2018
Charged-particle-beam device
HITACHI HIGH TECH CORP1 citations51
US9312091B2Apr 12, 2016
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US11456150B2Sep 27, 2022
Charged particle beam device
HITACHI HIGH TECH CORP0 citations50
US10707047B2Jul 7, 2020
Measuring device and measuring method
HITACHI HIGH TECH CORP0 citations41
US10559450B2Feb 11, 2020
Scanning electron microscope
HITACHI HIGH TECH CORP0 citations41
US8859962B2Oct 14, 2014
Charged-particle microscope
HITACHI HIGH TECH CORP0 citations40
FUKUDA MUNEYUKI
3 patentsUS8841612B2Sep 23, 2014
Charged particle beam microscope
FUKUDA MUNEYUKI12 citations83
US8389935B2Mar 5, 2013
Charged particle beam apparatus permitting high-resolution and high-contrast observation
FUKUDA MUNEYUKI7 citations83
US8431915B2Apr 30, 2013
Charged particle beam apparatus permitting high resolution and high-contrast observation
FUKUDA MUNEYUKI4 citations73