Inventor
KOYAMA HIKARU
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KOYAMA HIKARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
7 patentsUS7019294B2Mar 28, 2006
Inspection method and apparatus using charged particle beam
HITACHI HIGH TECH CORP32 citations92
US7655906B2Feb 2, 2010
Method and apparatus for scanning and measurement by electron beam
HITACHI HIGH TECH CORP13 citations83
US7276693B2Oct 2, 2007
Inspection method and apparatus using charged particle beam
HITACHI HIGH TECH CORP8 citations73
US10840060B2Nov 17, 2020
Scanning electron microscope and sample observation method
HITACHI HIGH TECH CORP1 citations62
US7547884B2Jun 16, 2009
Pattern defect inspection method and apparatus thereof
HITACHI HIGH TECH CORP4 citations62
US7501625B2Mar 10, 2009
Electron microscope application apparatus and sample inspection method
HITACHI HIGH TECH CORP3 citations62
US7652248B2Jan 26, 2010
Inspection apparatus and inspection method
HITACHI HIGH TECH CORP0 citations51