Inventor
NIE BUNSEN B
US10 patents
Patents
10 patentsUS11587784B2Feb 21, 2023
Smooth titanium nitride layers and methods of forming the same
EUGENUS INC3 citations71
US11482413B2Oct 25, 2022
Conformal and smooth titanium nitride layers and methods of forming the same
EUGENUS INC5 citations71
US12165918B2Dec 10, 2024
Conformal titanium nitride-based thin films and methods of forming same
EUGENUS INC2 citations70
US11361992B2Jun 14, 2022
Conformal titanium nitride-based thin films and methods of forming same
EUGENUS INC3 citations70
US12308226B2May 20, 2025
Conformal and smooth titanium nitride layers and methods of forming the same
EUGENUS INC0 citations61
US12444603B2Oct 14, 2025
Smooth titanium nitride layers and methods of forming the same
EUGENUS INC0 citations60
US12444648B2Oct 14, 2025
Conformal titanium silicon nitride-based thin films and methods of forming same
EUGENUS INC1 citations58
US12431388B2Sep 30, 2025
Conformal titanium silicon nitride-based thin films and methods of forming same
EUGENUS INC1 citations58
US12283486B2Apr 22, 2025
Conformal and smooth titanium nitride layers and methods of forming the same
EUGENUS INC0 citations58
US12272599B2Apr 8, 2025
Conformal and smooth titanium nitride layers and methods of forming the same
EUGENUS INC0 citations47