Inventor

TANGO NAOHIRO

JP15 patents

⚠️ This page may combine multiple inventors who share the name “TANGO NAOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJIFILM CORP

12 patents

US11281103B2Mar 22, 2022

Composition for forming upper layer film, pattern forming method, resist pattern, and method for manufacturing electronic device

FUJIFILM CORP2 citations72

US10175578B2Jan 8, 2019

Pattern forming method, composition for forming protective film, method for manufacturing electronic device, and electronic device

FUJIFILM CORP1 citations62

US11579528B2Feb 14, 2023

Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device

FUJIFILM CORP0 citations57

US10578968B2Mar 3, 2020

Pattern forming method, resist pattern, and process for producing electronic device

FUJIFILM CORP0 citations52

US10114292B2Oct 30, 2018

Pattern forming method, resist pattern, and method for manufacturing electronic device

FUJIFILM CORP0 citations52

US11249395B2Feb 15, 2022

Pattern forming method, method for manufacturing electronic device, laminate film, and composition for forming upper layer film

FUJIFILM CORP0 citations51

US11584810B2Feb 21, 2023

Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, method of manufacturing electronic device, compound, and resin

FUJIFILM CORP0 citations50

US12235579B2Feb 25, 2025

Method for producing actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device

FUJIFILM CORP0 citations49

US12242192B2Mar 4, 2025

Photosensitive resin composition, method for producing the same, resist film, pattern forming method, and method for manufacturing electronic device

FUJIFILM CORP0 citations47

US10852637B2Dec 1, 2020

Pattern forming method, resist pattern, method for manufacturing electronic device, and composition for forming upper layer film

FUJIFILM CORP0 citations41

US9454079B2Sep 27, 2016

Actinic ray- or radiation-sensitive resin composition, actinic ray- or radiation-sensitive film and method of forming pattern

FUJIFILM CORP0 citations40

US9810981B2Nov 7, 2017

Pattern formation method, etching method, electronic device manufacturing method, and electronic device

FUJIFILM CORP0 citations39

KATAOKA SHOHEI

1 patent

US8841060B2Sep 23, 2014

Actinic-ray-sensitive or radiation-sensitive resin composition, resist film and pattern forming method each using the composition, method for preparing electronic device, and electronic device

KATAOKA SHOHEI12 citations81

IIZUKA YUSUKE

1 patent

US8846293B2Sep 30, 2014

Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the same composition

IIZUKA YUSUKE3 citations56

TANGO NAOHIRO

1 patent

US8846290B2Sep 30, 2014

Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same

TANGO NAOHIRO0 citations34