Inventor
WEISS MARKUS
DE36 patents
⚠️ This page may combine multiple inventors who share the name “WEISS MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
18 patentsUS7015489B2Mar 21, 2006
Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
ZEISS CARL SMT AG36 citations95
US7460212B2Dec 2, 2008
Collector configured of mirror shells
ZEISS CARL SMT AG11 citations92
US7321126B2Jan 22, 2008
Collector with fastening devices for fastening mirror shells
ZEISS CARL SMT AG26 citations92
US7244954B2Jul 17, 2007
Collector having unused region for illumination systems using a wavelength ≦193 nm
ZEISS CARL SMT AG14 citations92
US7116394B2Oct 3, 2006
Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system
ZEISS CARL SMT AG31 citations92
US7084412B2Aug 1, 2006
Collector unit with a reflective element for illumination systems with a wavelength of smaller than 193 nm
ZEISS CARL SMT AG21 citations92
US7473907B2Jan 6, 2009
Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination
ZEISS CARL SMT AG26 citations90
US7248667B2Jul 24, 2007
Illumination system with a grating element
ZEISS CARL SMT AG16 citations84
US6912077B2Jun 28, 2005
Optical system
ZEISS CARL SMT AG15 citations83
US7875865B2Jan 25, 2011
EUV illumination system with a system for measuring fluctuations of the light source
ZEISS CARL SMT AG9 citations82
US6836530B2Dec 28, 2004
Illumination system with a plurality of individual gratings
ZEISS CARL SMT AG16 citations82
US7354168B2Apr 8, 2008
Facet mirror having a number of mirror facets
ZEISS CARL SMT AG17 citations81
US7362414B2Apr 22, 2008
Optical system having an optical element that can be brought into at least two positions
ZEISS CARL SMT AG8 citations73
US7091505B2Aug 15, 2006
Collector with fastening devices for fastening mirror shells
ZEISS CARL SMT AG8 citations73
US7090362B2Aug 15, 2006
Facet mirror having a number of mirror facets
ZEISS CARL SMT AG9 citations72
US7802891B2Sep 28, 2010
Faceted mirror apparatus
ZEISS CARL SMT AG2 citations60
US7246909B2Jul 24, 2007
Method for the production of a facetted mirror
ZEISS CARL SMT AG4 citations60
US7646004B2Jan 12, 2010
Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element
ZEISS CARL SMT AG2 citations58
NOVARTIS AG
4 patentsUS12215387B2Feb 4, 2025
Biomarker predictive of responsiveness to alpha 7 nicotinic acetylcholine receptor activator treatment
NOVARTIS AG0 citations58
US11359241B2Jun 14, 2022
Biomarkers predictive of responsiveness to alpha 7 nicotinic acetylcholine receptor activator treatment
NOVARTIS AG0 citations58
US9828642B2Nov 28, 2017
Biomarkers predictive of responsiveness to alpha 7 nicotinic acetylcholine receptor activator treatment
NOVARTIS AG1 citations58
US11311525B2Apr 26, 2022
Use of alpha 7 nicotinic acetylcholine receptor agonists
NOVARTIS AG0 citations54