P

Inventor

WEISS MARKUS

DE36 patents
⚠️ This page may combine multiple inventors who share the name “WEISS MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

18 patents
US7015489B2Mar 21, 2006

Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm

ZEISS CARL SMT AG36 citations95
US7460212B2Dec 2, 2008

Collector configured of mirror shells

ZEISS CARL SMT AG11 citations92
US7321126B2Jan 22, 2008

Collector with fastening devices for fastening mirror shells

ZEISS CARL SMT AG26 citations92
US7244954B2Jul 17, 2007

Collector having unused region for illumination systems using a wavelength ≦193 nm

ZEISS CARL SMT AG14 citations92
US7116394B2Oct 3, 2006

Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system

ZEISS CARL SMT AG31 citations92
US7084412B2Aug 1, 2006

Collector unit with a reflective element for illumination systems with a wavelength of smaller than 193 nm

ZEISS CARL SMT AG21 citations92
US7473907B2Jan 6, 2009

Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination

ZEISS CARL SMT AG26 citations90
US7248667B2Jul 24, 2007

Illumination system with a grating element

ZEISS CARL SMT AG16 citations84
US6912077B2Jun 28, 2005

Optical system

ZEISS CARL SMT AG15 citations83
US7875865B2Jan 25, 2011

EUV illumination system with a system for measuring fluctuations of the light source

ZEISS CARL SMT AG9 citations82
US6836530B2Dec 28, 2004

Illumination system with a plurality of individual gratings

ZEISS CARL SMT AG16 citations82
US7354168B2Apr 8, 2008

Facet mirror having a number of mirror facets

ZEISS CARL SMT AG17 citations81
US7362414B2Apr 22, 2008

Optical system having an optical element that can be brought into at least two positions

ZEISS CARL SMT AG8 citations73
US7091505B2Aug 15, 2006

Collector with fastening devices for fastening mirror shells

ZEISS CARL SMT AG8 citations73
US7090362B2Aug 15, 2006

Facet mirror having a number of mirror facets

ZEISS CARL SMT AG9 citations72
US7802891B2Sep 28, 2010

Faceted mirror apparatus

ZEISS CARL SMT AG2 citations60
US7246909B2Jul 24, 2007

Method for the production of a facetted mirror

ZEISS CARL SMT AG4 citations60
US7646004B2Jan 12, 2010

Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element

ZEISS CARL SMT AG2 citations58

NOVARTIS AG

4 patents

SIEMENS HEALTHCARE GMBH

1 patent

INVENTIO AG

1 patent

WEISS MARKUS

1 patent

MEDINNOVATION AG

1 patent

STREIF BAULOGISTIK GMBH

1 patent

KRONES AG

1 patent

SCHOLZ AXEL

1 patent

ASML NETHERLANDS BV

1 patent

WEDOWSKI MARCO

1 patent

AMERICAN SUPERCONDUCTOR CORP

1 patent

KLOESCH PETER

1 patent

ZEISS CARL SMT GMBH

1 patent

BITTEL PHILLIPP

1 patent

HAWE HYDRAULIK SE

1 patent