Inventor
KELKAR UMESH
US8 patents
⚠️ This page may combine multiple inventors who share the name “KELKAR UMESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7504006B2Mar 17, 2009
Self-ionized and capacitively-coupled plasma for sputtering and resputtering
APPLIED MATERIALS INC49 citations96
US6406599B1Jun 18, 2002
Magnetron with a rotating center magnet for a vault shaped sputtering target
APPLIED MATERIALS INC45 citations96
US6190037B1Feb 20, 2001
Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system
APPLIED MATERIALS INC455 citations96
US6790326B2Sep 14, 2004
Magnetron for a vault shaped sputtering target having two opposed sidewall magnets
APPLIED MATERIALS INC2 citations62
US12326282B2Jun 10, 2025
Cooling flow in substrate processing according to predicted cooling parameters
APPLIED MATERIALS INC0 citations57
US12518069B2Jan 6, 2026
Comprehensive modeling platform for manufacturing equipment
APPLIED MATERIALS INC0 citations45