Inventor
LU XIAOMING
CN24 patents
⚠️ This page may combine multiple inventors who share the name “LU XIAOMING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
12 patentsUS10248018B2Apr 2, 2019
Imprint apparatus and method of manufacturing article
CANON KK2 citations73
US10335984B2Jul 2, 2019
Imprint apparatus and article manufacturing method
CANON KK3 citations72
US10444624B1Oct 15, 2019
Active metrology frame and thermal frame temperature control in imprint lithography
CANON KK4 citations71
US12027373B2Jul 2, 2024
Planarization process, planarization system, and method of manufacturing an article
CANON KK0 citations62
US11869813B2Jan 9, 2024
Planarization apparatus, planarization process, and method of manufacturing an article
CANON KK0 citations62
US11614693B2Mar 28, 2023
Method of determining the initial contact point for partial fields and method of shaping a surface
CANON KK1 citations62
US11587795B2Feb 21, 2023
Planarization apparatus including superstrate chuck with bendable periphery
CANON KK1 citations62
US10654216B2May 19, 2020
System and methods for nanoimprint lithography
CANON KK1 citations62
US11994797B2May 28, 2024
System and method for shaping a film with a scaled calibration measurement parameter
CANON KK1 citations61
US12282251B2Apr 22, 2025
Method of shaping a surface, shaping system, and method of manufacturing an article
CANON KK0 citations51
US10409178B2Sep 10, 2019
Alignment control in nanoimprint lithography based on real-time system identification
CANON KK0 citations41
US10199244B2Feb 5, 2019
Imprint apparatus, and method of manufacturing article
CANON KK0 citations41
LU XIAOMING
3 patentsUS8945444B2Feb 3, 2015
High throughput imprint based on contact line motion tracking control
LU XIAOMING7 citations82
US8880873B2Nov 4, 2014
Method, system and device for authenticating cardless terminal using application server
LU XIAOMING6 citations71
US8984270B2Mar 17, 2015
Data file decryption method, decryption device and data broadcasting system
LU XIAOMING0 citations33