Inventor
KINKA MIKIO
JP15 patents
Patents
15 patentsUS4986213AJan 22, 1991
Semiconductor manufacturing device
SEMICONDUCTOR ENERGY LAB121 citations99
US4888305ADec 19, 1989
Method for photo annealing non-single crystalline semiconductor films
SEMICONDUCTOR ENERGY LAB131 citations99
US5296405AMar 22, 1994
Method for photo annealing non-single crystalline semiconductor films
SEMICONDUCTOR ENERGY LAB100 citations96
US4806496AFeb 21, 1989
Method for manufacturing photoelectric conversion devices
SEMICONDUCTOR ENERGY LAB93 citations96
US5171710ADec 15, 1992
Method for photo annealing non-single crystalline semiconductor films
SEMICONDUCTOR ENERGY LAB41 citations92
US5089426AFeb 18, 1992
Method for manufacturing a semiconductor device free from electrical shortage due to pin-hole formation
SEMICONDUCTOR ENERGY LAB41 citations92
US4987005AJan 22, 1991
Chemical vapor processing method for deposition or etching on a plurality of substrates
SEMICONDUCTOR ENERGY LAB31 citations92
US4847669AJul 11, 1989
Tandem photoelectric conversion device
SEMICONDUCTOR ENERGY LAB40 citations92
US4786607ANov 22, 1988
Method for manufacturing a semiconductor device free from current leakage through a semiconductor layer
SEMICONDUCTOR ENERGY LAB40 citations92
US4725558AFeb 16, 1988
Semiconductor defects curing method and apparatus
SEMICONDUCTOR ENERGY LAB49 citations92
US5039928AAug 13, 1991
Accumulator for portable computers
SEMICONDUCTOR ENERGY LAB51 citations90
US4937651AJun 26, 1990
Semiconductor device free from the current leakage through a semiconductor layer and method for manufacturing same
SEMICONDUCTOR ENERGY LAB20 citations82
US4828668AMay 9, 1989
Sputtering system for deposition on parallel substrates
SEMICONDUCTOR ENERGY LAB17 citations74
US4812415AMar 14, 1989
Method for making semiconductor device free from electrical short circuits through a semiconductor layer
SEMICONDUCTOR ENERGY LAB15 citations74
US5035753AJul 30, 1991
Photoelectric conversion device
SEMICONDUCTOR ENERGY LAB13 citations72